FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE

High-brightness Cs focused ion beam from a cold-atomic-beam ion source

We present measurements of focal spot size and brightness in a focused ion beam system utilizing a laser-cooled atomic beam source of Cs ions. Spot sizes as small as (2.1 ± 0.2) nm (one standard deviation) and reduced brightness values as high as (2.4 ± 0.1) × 107 A m-2 Sr-1 eV-1 are observed with a 10 keV beam. This measured brightness is over 24 times higher than the highest brightness observ...

Focused Ion Beam Lithography

ANGULAR RESOLVED ENERGY ANALYSIS OF 69Ga+ IONS FROM A GALLIUM LIQUID METAL ION SOURCE

An analysis system has been designed and built to characterise liquid metal ion source beams. Both mass and angular resolved energy distribution measurements can be made, from which both FWHM energy spreads and energy deficits can be obtained. This paper briefly describes the system and presents and discusses the first off-axis results taken with a gallium liquid metal ion source. Liquid metal ...

Stable field-induced electron emission from a solidified liquid metal ion source

Stable field-induced electron emission is derived from a tungsten tip covered by indium which has been solidified from its liquid state during an ion emission process. By choosing different ion emission currents at the beginning of the solidification process, the final geometry of the solidified emitter can be reshaped and the characteristics of the electron emission changed. The Fowler– Nordhe...

Varnish microlaminations: new insights from focused ion beam preparation

The cross-sectional texture of rock varnish varies considerably with the scale of analysis and technique used to image a sample. Each jump in resolution results in new insight, with the current state-of-the-art resting at the nanoscale. One key to nanoscale analysis involves focused ion beam (FIB) techniques used most frequently in material science and semiconductor failure analysis. FIB prepar...